diff --git a/src/Tracing.jl b/src/Tracing.jl
index aa39f08141..de89fe9dae 100644
--- a/src/Tracing.jl
+++ b/src/Tracing.jl
@@ -381,7 +381,10 @@ Base.@nospecializeinfer function traced_type_inner(
             }
         end
         error("Unsupported runtime $runtime")
-    elseif mode == TracedTrack || mode == NoStopTracedTrack || mode == TracedSetPath
+    elseif mode == TracedTrack ||
+        mode == NoStopTracedTrack ||
+        mode == TracedSetPath ||
+        mode == TracedToTypes
         return T
     else
         throw("Abstract RArray cannot be made concrete in mode $mode")
@@ -427,7 +430,10 @@ Base.@nospecializeinfer function traced_type_inner(
             }
         end
         error("Unsupported runtime $runtime")
-    elseif mode == TracedTrack || mode == NoStopTracedTrack || mode == TracedSetPath
+    elseif mode == TracedTrack ||
+        mode == NoStopTracedTrack ||
+        mode == TracedSetPath ||
+        mode == TracedToTypes
         return T
     else
         throw("Abstract RNumber cannot be made concrete in mode $mode")
@@ -1239,7 +1245,14 @@ Base.@nospecializeinfer function make_tracer(
         throw("Cannot trace existing trace type")
     end
     if mode == TracedToTypes
-        push!(path, MLIR.IR.type(prev.mlir_data))
+        # for TracedRArrays, we check for objectid equality because make_mlir_fn gets rid of duplicate TracedRArrays.
+        # i.e. (a, a) should hash differently than (a, b) when a and b are different TracedRArrays.
+        if haskey(seen, objectid(prev))
+            push!(path, seen[objectid(prev)])
+        else
+            push!(path, MLIR.IR.type(prev.mlir_data))
+            seen[objectid(prev)] = VisitedObject(length(seen) + 1)
+        end
         return nothing
     end
     if mode == TracedTrack
@@ -1317,7 +1330,14 @@ Base.@nospecializeinfer function make_tracer(
         throw("Cannot trace existing trace type")
     end
     if mode == TracedToTypes
-        push!(path, MLIR.IR.type(prev.mlir_data))
+        # for TracedRArrays, we check for objectid equality because make_mlir_fn gets rid of duplicate TracedRArrays.
+        # i.e. (a, a) should hash differently than (a, b) when a and b are different TracedRArrays.
+        if haskey(seen, objectid(prev))
+            push!(path, seen[objectid(prev)])
+        else
+            push!(path, MLIR.IR.type(prev.mlir_data))
+            seen[objectid(prev)] = VisitedObject(length(seen) + 1)
+        end
         return nothing
     end
     if mode == TracedTrack