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To propagate the answer from the QEMU bug report, this is a hardware limitation of the CPU you are running on. These Apple CPUs seem to have an intermediate physical address space (IPA) limit of 36 bits. That means you can't create a VM with so much RAM that the RAM would need to go above the 64GB mark. (You hit the limit at a bit lower than 64GB passed to the VM because RAM doesn't start at 0GB and there is some space used in the VM address space for devices and so on.)

You'll need to use different host hardware if you want to run larger VMs than this, I'm afraid. (Non-Apple AArch64 CPUs generally have an IPA limit of 40 bits or larger.)

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