diff --git a/src/common/tracing/src/predefined_tables/history_tables.toml b/src/common/tracing/src/predefined_tables/history_tables.toml
index b3ffce93700d0..5ebae2e931022 100644
--- a/src/common/tracing/src/predefined_tables/history_tables.toml
+++ b/src/common/tracing/src/predefined_tables/history_tables.toml
@@ -3,7 +3,7 @@
 name = "log_history"
 target = ""
 create = "CREATE TABLE IF NOT EXISTS system_history.log_history (timestamp TIMESTAMP NULL, path STRING NULL, target STRING NULL, log_level STRING NULL, cluster_id STRING NULL, node_id STRING NULL, warehouse_id STRING NULL, query_id STRING NULL, message STRING NULL, fields VARIANT NULL, batch_number Int64) CLUSTER BY LINEAR(timestamp, query_id)"
-transform = "settings (timezone='Etc/UTC') COPY INTO system_history.log_history FROM (SELECT timestamp, path, target, log_level, cluster_id,node_id, warehouse_id, query_id, message, fields, {batch_number} FROM @{stage_name}) file_format = (TYPE = PARQUET) PURGE = TRUE"
+transform = "settings (timezone='Etc/UTC') COPY INTO system_history.log_history FROM (SELECT timestamp, path, target, log_level, cluster_id,node_id, warehouse_id, query_id, message, fields, {batch_number} FROM @{stage_name}) file_format = (TYPE = PARQUET) PURGE = TRUE MAX_FILES = 5000"
 delete = "DELETE FROM system_history.log_history WHERE timestamp < subtract_hours(NOW(), {retention_hours})"
 
 [[tables]]
diff --git a/src/query/service/src/history_tables/global_history_log.rs b/src/query/service/src/history_tables/global_history_log.rs
index 5cca20ea55509..6a383a732c096 100644
--- a/src/query/service/src/history_tables/global_history_log.rs
+++ b/src/query/service/src/history_tables/global_history_log.rs
@@ -12,6 +12,7 @@
 // See the License for the specific language governing permissions and
 // limitations under the License.
 
+use std::cmp::min;
 use std::sync::atomic::AtomicBool;
 use std::sync::atomic::Ordering;
 use std::sync::Arc;
@@ -46,6 +47,7 @@ use futures_util::future::join_all;
 use futures_util::TryStreamExt;
 use log::error;
 use log::info;
+use log::warn;
 use opendal::raw::normalize_root;
 use parking_lot::Mutex;
 use rand::random;
@@ -161,30 +163,45 @@ impl GlobalHistoryLog {
             let meta_key = format!("{}/history_log_transform", self.tenant_id).clone();
             let log = GlobalHistoryLog::instance();
             let handle = spawn(async move {
-                let mut consecutive_error = 0;
+                let mut persistent_error_cnt = 0;
+                let mut temp_error_cnt = 0;
                 loop {
                     match log.transform(&table_clone, &meta_key).await {
                         Ok(acquired_lock) => {
                             if acquired_lock {
-                                consecutive_error = 0;
+                                persistent_error_cnt = 0;
+                                temp_error_cnt = 0;
                             }
+                            sleep(sleep_time).await;
                         }
                         Err(e) => {
-                            error!(
-                                "[HISTORY-TABLES] {} log transform failed due to {}, retry {}",
-                                table_clone.name, e, consecutive_error
-                            );
-                            consecutive_error += 1;
-                            if consecutive_error > 3 {
+                            if is_temp_error(&e) {
+                                // If the error is temporary, we will retry with exponential backoff
+                                // The max backoff time is 10 minutes
+                                let backoff_second = min(2u64.pow(temp_error_cnt), 10 * 60);
+                                temp_error_cnt += 1;
+                                warn!(
+                                    "[HISTORY-TABLES] {} log transform failed with temporary error {}, count {}, next retry in {} seconds",
+                                    table_clone.name, e, temp_error_cnt, backoff_second
+                                );
+                                sleep(Duration::from_secs(backoff_second)).await;
+                            } else {
                                 error!(
-                                    "[HISTORY-TABLES] {} log transform failed too many times, exit",
-                                    table_clone.name
+                                    "[HISTORY-TABLES] {} log transform failed with persistent error {}, retry count {}",
+                                    table_clone.name, e, persistent_error_cnt
                                 );
-                                break;
+                                persistent_error_cnt += 1;
+                                if persistent_error_cnt > 3 {
+                                    error!(
+                                        "[HISTORY-TABLES] {} log transform failed too many times, giving up",
+                                        table_clone.name
+                                    );
+                                    return;
+                                }
+                                sleep(sleep_time).await;
                             }
                         }
                     }
-                    sleep(sleep_time).await;
                 }
             });
             handles.push(handle);
@@ -433,3 +450,22 @@ pub async fn setup_operator(params: &Option<StorageParams>) -> Result<()> {
     GlobalLogger::instance().set_operator(op).await;
     Ok(())
 }
+
+/// Check if the error is a temporary error,
+/// We will use this to determine if we should retry the operation.
+fn is_temp_error(e: &ErrorCode) -> bool {
+    let code = e.code();
+    let message = e.message();
+    // Storage and I/O errors are considered temporary errors
+    let storage = code == ErrorCode::STORAGE_NOT_FOUND
+        || code == ErrorCode::STORAGE_PERMISSION_DENIED
+        || code == ErrorCode::STORAGE_UNAVAILABLE
+        || code == ErrorCode::STORAGE_UNSUPPORTED
+        || code == ErrorCode::STORAGE_INSECURE
+        || code == ErrorCode::INVALID_OPERATION
+        || code == ErrorCode::STORAGE_OTHER;
+    // If acquire semaphore failed, we consider it a temporary error
+    let meta = code == ErrorCode::INTERNAL && message.contains("acquire semaphore failed");
+    let transaction = code == ErrorCode::UNRESOLVABLE_CONFLICT;
+    storage || transaction || meta
+}
diff --git a/src/query/service/src/history_tables/meta.rs b/src/query/service/src/history_tables/meta.rs
index 78e235d24a9a4..1098676f9fc4c 100644
--- a/src/query/service/src/history_tables/meta.rs
+++ b/src/query/service/src/history_tables/meta.rs
@@ -90,7 +90,7 @@ impl HistoryMetaHandle {
             Duration::from_secs(3),
         ))
         .await
-        .map_err(|_e| "acquire semaphore failed from GlobalHistoryLog")?;
+        .map_err(|e| format!("acquire semaphore failed from GlobalHistoryLog {}", e))?;
         if interval == 0 {
             return Ok(Some(acquired_guard));
         }