diff --git a/flang/test/Semantics/modfile71.F90 b/flang/test/Semantics/modfile71.F90
index 7c3c7f5b48958..7f32eb18c6f8f 100644
--- a/flang/test/Semantics/modfile71.F90
+++ b/flang/test/Semantics/modfile71.F90
@@ -1,6 +1,7 @@
-!RUN: %flang_fc1 -fsyntax-only -fhermetic-module-files -DSTEP=1 %s
-!RUN: %flang_fc1 -fsyntax-only -DSTEP=2 %s
-!RUN: not %flang_fc1 -fsyntax-only -pedantic %s 2>&1 | FileCheck %s
+!RUN: rm -rf %t && mkdir -p %t
+!RUN: %flang_fc1 -fsyntax-only -fhermetic-module-files -DSTEP=1 -J%t %s
+!RUN: %flang_fc1 -fsyntax-only -DSTEP=2 -J%t %s
+!RUN: not %flang_fc1 -fsyntax-only -pedantic -J%t %s 2>&1 | FileCheck %s
 
 ! Tests that a module captured in a hermetic module file is compatible when
 ! USE'd with a module of the same name USE'd directly.
diff --git a/flang/test/Semantics/modfile75.F90 b/flang/test/Semantics/modfile75.F90
index aba00ffac848a..8f7adafe7204d 100644
--- a/flang/test/Semantics/modfile75.F90
+++ b/flang/test/Semantics/modfile75.F90
@@ -1,4 +1,5 @@
-!RUN: %flang -c -fhermetic-module-files -DWHICH=1 %s && %flang -c -fhermetic-module-files -DWHICH=2 %s && %flang_fc1 -fdebug-unparse %s | FileCheck %s
+!RUN: rm -rf %t && mkdir -p %t
+!RUN: %flang -c -fhermetic-module-files -DWHICH=1 -J%t %s && %flang -c -fhermetic-module-files -DWHICH=2 -J%t %s && %flang_fc1 -fdebug-unparse -J%t %s | FileCheck %s
 
 #if WHICH == 1
 module modfile75a
diff --git a/flang/test/Semantics/modfile76.F90 b/flang/test/Semantics/modfile76.F90
index 50ee9a088e119..c7ae91bd42bed 100644
--- a/flang/test/Semantics/modfile76.F90
+++ b/flang/test/Semantics/modfile76.F90
@@ -1,23 +1,24 @@
-!RUN: %flang_fc1 -fsyntax-only -fhermetic-module-files -DSTEP=1 %s
-!RUN: %flang_fc1 -fsyntax-only %s
+!RUN: rm -rf %t && mkdir -p %t
+!RUN: %flang_fc1 -fsyntax-only -fhermetic-module-files -DSTEP=1 -J%t %s
+!RUN: %flang_fc1 -fsyntax-only -J%t %s
 
 ! Tests that a BIND(C) variable in a module A captured in a hermetic module
 ! file USE'd in a module B is not creating bogus complaints about BIND(C) name
 ! conflict when both module A and B are later accessed.
 
 #if STEP == 1
-module modfile75a
+module modfile76a
   integer, bind(c) :: x
 end
 
-module modfile75b
-  use modfile75a ! capture hermetically
+module modfile76b
+  use modfile76a ! capture hermetically
 end
 
 #else
 subroutine test
-  use modfile75a
-  use modfile75b
+  use modfile76a
+  use modfile76b
   implicit none
   print *, x
 end subroutine
diff --git a/flang/test/Semantics/modfile77.F90 b/flang/test/Semantics/modfile77.F90
index a82904ebbcc22..9ad615c16c43c 100644
--- a/flang/test/Semantics/modfile77.F90
+++ b/flang/test/Semantics/modfile77.F90
@@ -1,4 +1,5 @@
-!RUN: %flang -c -fhermetic-module-files -DWHICH=1 %s && %flang -c -fhermetic-module-files -DWHICH=2 %s && %flang -c -fhermetic-module-files %s && cat modfile77c.mod | FileCheck %s
+!RUN: rm -rf %t && mkdir -p %t
+!RUN: %flang -c -fhermetic-module-files -DWHICH=1 -J%t %s && %flang -c -fhermetic-module-files -DWHICH=2 -J%t %s && %flang -c -fhermetic-module-files -J%t %s && cat %t/modfile77c.mod | FileCheck %s
 
 #if WHICH == 1
 module modfile77a
diff --git a/flang/test/Semantics/modfile78.F90 b/flang/test/Semantics/modfile78.F90
index cb3eccd9a4108..19b9ac39de934 100644
--- a/flang/test/Semantics/modfile78.F90
+++ b/flang/test/Semantics/modfile78.F90
@@ -1,4 +1,5 @@
-!RUN: %flang -c -fhermetic-module-files -DWHICH=1 %s && %flang -c -fhermetic-module-files -DWHICH=2 %s && %flang -c -fhermetic-module-files %s && cat modfile78c.mod | FileCheck %s
+!RUN: rm -rf %t && mkdir -p %t
+!RUN: %flang -c -fhermetic-module-files -DWHICH=1 -J%t %s && %flang -c -fhermetic-module-files -DWHICH=2 -J%t %s && %flang -c -fhermetic-module-files -J%t %s && cat %t/modfile78c.mod | FileCheck %s
 
 #if WHICH == 1
 module modfile78a
diff --git a/flang/test/Semantics/modfile79.F90 b/flang/test/Semantics/modfile79.F90
index 7d3b42166654e..ae156527b3bf3 100644
--- a/flang/test/Semantics/modfile79.F90
+++ b/flang/test/Semantics/modfile79.F90
@@ -1,4 +1,5 @@
-!RUN: %flang -c -DWHICH=1 %s && FileCheck %s <modfile79a.mod && %flang -c -fhermetic-module-files -DWHICH=2 %s && %flang -c %s && FileCheck %s <modfile79a.mod
+!RUN: rm -rf %t && mkdir -p %t
+!RUN: %flang -c -DWHICH=1 -J%t %s && FileCheck %s <%t/modfile79a.mod && %flang -c -fhermetic-module-files -DWHICH=2 -J%t %s && %flang -c -J%t %s && FileCheck %s <%t/modfile79a.mod
 
 !Ensure that writing modfile79c.mod doesn't cause a spurious
 !regeneration of modfile79a.mod from its copy in the hermetic